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刘治国

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Completely <111>-textured growth and enhanced ferroelectric properties of Pb (Ta0.05Zr0.48Ti0.47) O3 films on Pt/TiO2/SiO2 /Si (001) using SrRuO3 buffer layer

刘治国J. Yin Z. G. Liua) and Z. C. Wu

Appl. Phys. Lett., Vol. 75, No.21, 22 November 1999,-0001,():

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摘要/描述

Completely <111>-textured Pb(Ta0.05Zr0.48Ti0.47)O3 (PTZT)films are grown on Pt/TiO2 /SiO2 /Si(001) substrates by pulsed-laser deposition using SrRuO3 as a buffer layer. It is argued that the small lattice-mismatch in (111) plane between Pt and SrRuO3 and the compatible perovskite structures for SrRuO3 and PTZT are responsible for the complete (111) orientation of PTZT films. The as-fabricated PTZT ferroelectric capacitor exhibits large remnant polarizations 1Pr518.4mC/cm2, and 2Pr5216.0mC/cm2, and very low leakage current as well. The excellent fatigue-resisting property of PTZT films in terms of the polarization degradation is demonstrated.

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