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李明伟

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期刊论文

Global simulation of a silicon Czochralski furnace

李明伟Mingwei Li a YourongLi a Nobuyuki Imaishi a* Takao Tsukada b

Journal of Crystal Growth 234(2002)32-46,-0001,():

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摘要/描述

To understand the characteristics of the Czochralski (Cz) furnace for the single-crystal growth of silicon, a set of global analyses of momentum, heat and mass transfer in small Cz furnaces (crucible diameter: 7.2cm, crystal diameter: 3.5cm, operated in a 10 Torr argon flow environment) is carried out using the finite-element method. The global analysis assumes a pseudosteady axisymmetric state with laminar flow, equilibrium relations at the melt/silica interface and vapor-liquid chemical equilibrium at the melt/gas interface, as well as the segregation coefficient of unity at the melt/crystal interface. Convective and conductive heat transfers, radiative heat transfer between diffuse surfaces and the Navier-Stokes equations for gas and melt phases are all combined and solved together. Thus, the velocities and temperatures obtained are used to calculate the oxygen concentrations. The global analysis code is effectively used to discuss the influences of the Marangoni effect and a gas guide (or a heat shield) placed between the crucible and the crystal. The results indicate that the gas guide reduces the heater power and changes the melt flow pattern and oxygen transport. The melt flow pattern is strongly dependent on the Marangoni effect and gas flow near the surface, and changes the oxygen concentration significantly. This analysis reveals the importance and effectiveness of global analysis.

【免责声明】以下全部内容由[李明伟]上传于[2005年11月04日 22时40分03秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。

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