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卢荣胜

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期刊论文

On-line measurement of surface roughness by laser light scattering

卢荣胜Rong-Sheng Lu Gui Yun Tian

Institute of Physics Publishing Measurement Science and Technology Meas. Sci. Technol. 17 (2006) 1496-1502,-0001,():

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摘要/描述

On-line roughness measurement of a surface with one-dimensional manufacturing marks is difficult to implement. For example, a contact stylus-type inspection method often does not perform very well or fails without any prior knowledge of the mark distribution on the surface. In this paper, we propose an on-line surface roughness measurement method based on laser light scattering, which is very effective for roughness measurement of one-dimensional manufacturing surfaces. The surface roughness is obtained from the spatial distribution of the scattered light intensity. The measurement setup has a very simple configuration, which consists of a CCD sensor, a collimated diode laser and an expander. The orientation of the spatial distribution of the scattered light intensity from the surface, which depends on the surface orientation, is detected by the CCD sensor, and then the mark direction can be readily determined from image processing. After that the root-mean-square (RMS) height of the surface roughness is extracted by means of image processing of the scattered light distribution in the direction parallel to the manufacturing mark, rather than in the direction perpendicular to the mark which is often followed by other measurement probes. The experimental tests show that the non-contact method has great potential for on-line surface roughness measurement.

【免责声明】以下全部内容由[卢荣胜]上传于[2007年03月30日 15时06分39秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。

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