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期刊论文

Preparation and properties of indium tin oxide films deposited on polyester substraters by reactive evaporation

马瑾Jin Ma Shu-Ying Li Jun-qing Zhao Hong-Lei Ma

Thin Solid Films 307 (1997) 200-202,-0001,():

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摘要/描述

Highly transparent conducting indium tin oxide(ITO) films have been prepared on polyester thin film substrate by reactively evaporating metal In-Sn alloy in a system with an oxygen partial pressure of (3-30)×10-5 Torr and substrate temperatures between 80 and 240℃. The structure and opto-electrical properties of the films depending on the deposition conditions have been investigated. High quality films with a average transparency of 83% and the resistivity of 7×10-4 v cm have been obtained by controlling the deposition prameters.

版权说明:以下全部内容由马瑾上传于   2007年11月22日 14时01分56秒,版权归本人所有。

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