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期刊论文
Tuning Effect on the Electron Energy Distribution Function of an Inert Gas Mixture in nitrogen Inductively Coupled Plasma Discharges*
CHIN.PHYS.LETT. Vol. 20, No.9 (2003) 1527,-0001,():
By using a Langmuir probe, the electron energy distribution function (EEDF) is measured in inductively coupled plasma discharges in N2/Ar mixtures at 200W rf powers. In pure N2 discharges a Maxwellian EEDF is observed. When the mixing ratio of Ar increases, the distribution of high-energy electrons evolves with a dierent trend from that of low-energy electrons, resulting in an apparent "two temperature structure" of the EEDF We discuss this non-Maxwellian EEDF and its effect on the measurement and the interpretation of "electron temperature" by both the probe and line ratio technique.
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