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王友年

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期刊论文

Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrodes

王友年Zhong-Ling Dai* You-Nian Wang and Teng-Cai Ma

PHYSICAL REVIEW E, VOLUME 65, 036403,-0001,():

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摘要/描述

A self-consistent fluid model is proposed for describing collisionless radio-frequency ~rf! sheaths driven by a sinusoidal current source. This model includes all time-dependent terms in ion fluid equations, which are commonly ignored in some analytical models and numerical simulations. Moreover, an equivalent circuit model is introduced to determine self-consistently the relationship between the instantaneous potential at a rf-biased electrode and the sheath thickness. The time-dependent voltage wave form, the sheath thickness and the ion flux at the electrode as well as the spatiotemporal variations of the potential, the electric field and the ion density inside the sheath are calculated for various rf powers and ratios of the rf frequency to the ion plasma frequency. The ion energy distributions ~ IEDs! impinging on the rf-biased electrode are also calculated with the ion flux at the electrode. The numerical results show that the frequency ratio is a crucial parameter determining the spatiotemporal variations of the rf sheath and the shape of the IEDs.

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【免责声明】以下全部内容由[王友年]上传于[2005年03月07日 23时54分44秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。

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