您当前所在位置: 首页 > 学者

王占山

  • 20浏览

  • 0点赞

  • 0收藏

  • 0分享

  • 141下载

  • 0评论

  • 引用

期刊论文

Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft X-ray and EUV regions

王占山Alan G. Michette a* Zhanshan Wang ab

Optics Communications 177(2000)47-55,-0001,():

URL:

摘要/描述

A systematic method which allows the optimum thickness of each layer in a depth-graded multilayer coating to be determined is described. This enables specific reflectivity responses over broad wavelength bands in the soft X-ray and EUV regions to be calculated. The method is applied to the design of some depth-graded molybdenumrsilicon multilayers for the wavelength range 13-19nm, with average normal incidence reflectivities of about 13% in this range, but it is generally applicable for other material pairs and wavelength ranges. In addition, the effects of layer thickness errors on the performance of depth-graded multilayers can be simulated. The model gives better results than those based on power law variation of the layer thicknesses.

版权说明:以下全部内容由王占山上传于   2004年12月29日 18时36分45秒,版权归本人所有。

我要评论

全部评论 0

本学者其他成果

    同领域成果