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期刊论文

3D Large Scale Visualization Algorithm for Photolithographic Simulation

万旺根CUI Bin* WAN Wanggen* TANG Jing-Jout ZHOU Junwei* TAO Dao*

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摘要/描述

The visualization and interaction of the photolithography simulation result is useful and challenging. We introduce algorithms that include an automatic sorting algorithm, a transformation model and a dynamic loading algorithm to visualize the large-scale photolithography simulation data in three dimensions in real-time. The automatic sorting algorithm is presented to resort the data output by simulator. And the transformation model converts light intensity data into depth data for 3D modelling. Moreover, the dynamic loading algorithm realizes the out of core visualization. The experimental results demonstrate that our algorithms are effective for photolithography simulation data with 3D largescale interactive visualization in real-time.

版权说明:以下全部内容由万旺根上传于   2011年05月18日 09时32分31秒,版权归本人所有。

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