Hydrophobic organic-inorganic silica hybrid films were prepared by means of a two-step acid-catalyzed methodand sol-gel process using surfactant as template. Methyltriethoxysilane(MTES) and tetraethoxysilane(TEOS) wereco-hydrolyzed in different molar ration and were used as precursors. Addition MTES in TEOS precursors produces adecrease of Si-OH and Si-O- surface content. The infrared spectra of the films thus obtained indicated that they becomehydrophobic with the introduction of the methyl groups. Contact angle instrument was also used to supplement the result.Contact angle values for hydrophobic hybrid films are greater than120 degree. The refractive indices and thickness ofhydrophobic hybrid films are about 1.22-1.24 and about 270-300nm The Optical transmittance spectra and mechanicalintensity measurement results showed that the films have good optical and mechanical properties.