The film of La2/3Ca1/3MnO3 (LCMO), YBa2Cu3O7−δ (YBCO) and YBCO/LCMO bi-layer were prepared by rf off-axis magnetic sputtering technique on SrTiO3 (STO) substrate. The structures, including the surface and interfacial morphology, the interfacial diffusion and so on, have been characterized by X-ray diffraction (XRD), auger electronic energy spectroscopy (AES) and atomic force microscopy (AFM). Through a 50-200eV energy range, a single layer of YBCO shows a very small reflectance (<2%), while a single layer of LCMO shows a higher reflectance of about 25% at the energy of about 75eV, which is much higher than that of metal W. Even higher reflectance (>50%) at about 75eV has been observed in the LCMO/YBCO bi-layers.