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期刊论文
Micro linear zig-zag delay mechanisms based on LIGA technique
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In this paper, the details of micro linear zig-zag delay mechanisms is given, including some correlative figures, and the technical process of machining this micro-mechanisms by LIGA technique is shown, moreover athematics modeling for elasticity distortion of micro linear zig-zag delay mechanisms is established.
【免责声明】以下全部内容由[张河]上传于[2005年03月21日 18时26分11秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。
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