Abnomlal grain growth and texture change in both free standing and attached Ag and Cu fihns after annealing at 300℃ for 2h havebeen investigated with transmission electron microscopy (TEM) and X-ray diffraction (XRD). XRD texture analysis showed that both Ag and Cu fihns deposited on the (001)-oriented single crystal Si snbstrates had (111) and (100) donble fiber textures. 0/20 scmming XRD patterns showed that, after mmealing, the free standing Ag and Cu fihns showed a slight increase in the (111) texture, on the contrary, both Ag and Cu fihns attached on Si snbstrates showed an increase in (100) and (110) textures. Four anomalous large grains with same (211) orientation were observed in attached Cu fihns after annealing by TEM. The experimental resnlts have been explained satisfactorily from anisotropy of surface energy and strain energy.