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期刊论文
Strain-energy-driven abnormal grain growth in copper films on silicon substrates
Journal of Crystal Growth 226(2001)168-174,-0001,():
Abnormal grain growth in thin Cu films on Si substrates has been investigated as a function of annealing time. Abnormal grains with (110) orientation were observed by transmission electron microscopy. X-ray diffraction patterns showed that the films which underwent extensive abnormal grain growth also underwent a change in texture from (111) to (100), (110) and (311). A simple theoretical analysis showed that these were the results of a strain-energy-driven abnormal grain growth process.
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