Superconducting YBa2Cu3O7-χ (YBCO) thin films were deposited on Si (111) substates with a conductive intermediate layer of Ag/In2O3. In2O3 was prepared by the d.c. magnetron method and a silver thin film was evaporated on the In2O3/Si (111). The YBCO thin fims were deposited by d.c. magnetron sputtering. The conductive In2O3 thin film was used to minimize the interdiffusion between silicon and the YBCO superconducting material. The silver thin film improves the zero-resistance temperature, transition temperature width, and the critical current density of the superconducting YBCO film in the YBCO/In2O3/Si system. Films of YBCO on the Ag/In2O3/Si substrate have zero resistance at 85K and a critical current density of 2.0×103 A cm-2 at 77K. The XRD spectrum indicates that the superconducting thin films have a preferential c axis oriented structure. Auger electron spectroscopy depth profiling was used to analyse the interfaces.