We developed a novel transparent conductive film, molybdenum-doped indium oxide (IMO). Using normal thermal reactive evaporation without any special treatments, IMO films have been prepared on normal glass microscope slides at about 350℃ with electrical resistivity of 1.731024 Vcm, mobility over 100 cm2 V21 s21, and an average spectral transmittance in the visible region over 80%. From x-ray photoelectron spectroscopy and x-ray diffraction spectra of the IMO films, it is confirmed that the lattice of IMO is the same as that of In2O3 of cubic bixbyite structure, Mo61 substitutes for In31 in In2O3, and there are no new compounds in IMO. The valence difference of 3 between Mo61 and In31 is of great advantage to the IMO film with high conductivity and high transparency simultaneously. © 2002 American Vacuum Society.