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期刊论文
Influence of laser parameters andmaterial properties onmicro drilling with femtosecond laser pulses
Appl. Phys. A 69 [Suppl.], S367-S371(1999),-0001,():
We report experimental results of drilling micro holes in Al, Mo, Ti, Cu, Ag, Au, and brass thin metal foils in air using 60-femtosecond Ti:sapphire laser pulses. The influence of laser parameters and material properties on drilling processes at the sub-10-micron scale has been examined. Comparison of hole drilling using 60-fs pulses with that using 50-ps and 10-ns pulses at an energy fluence of 15 J=cm2 indicates that a significant amount of melting is present in both ps and ns regimes, whereas with fs pulses, fewer and much smaller droplets from the molten phase are observed.
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