蒲以康
等离子体不稳定性的理论和实验,等离子体诊断,等离子体与器壁相互作用和等离子体在环保上的应用。
个性化签名
- 姓名:蒲以康
- 目前身份:
- 担任导师情况:
- 学位:
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学术头衔:
博士生导师
- 职称:-
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学科领域:
等离子体物理学
- 研究兴趣:等离子体不稳定性的理论和实验,等离子体诊断,等离子体与器壁相互作用和等离子体在环保上的应用。
蒲以康,现为清华大学工程物理系教授,博士生导师。主要研究领域为:等离子体不稳定性的理论和实验,等离子体诊断,等离子体与器壁相互作用和等离子体在环保上的应用。1988年9月美国麻省理工学院物理系获得博士学位后,一直从事低温等离子体和材料相互作用方面的工作。1988年-1994年在美国Spire公司从事低温等离子体在工业上的应用工作,曾主持了美国能源部、空军及NASA的多项研究课题,参与了美国陆军、国防部和国家基金会的多个项目的研究。1994年回国后,任北京理工大学教授,从事等离仓体在环保技术上的应用研究工作和低温等离子体辅助材料生长和处理的研究工作。1999年调到清华电机系从事低温等离子体辅助材料生长和处理的研究工作,并入先校“百人计划”。2002年转入清华工物系。在高密度低温等离子体的诊断和活性粒子的调节和控制方面,取得了一定的研究成果。曾多次在国际会议上作邀请报告汇报研究成果,并在国际学术组织中兼职。
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【期刊论文】Tuning the electron temperature of a nitrogen plasma by adding helium and argon
蒲以康
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-1年11月30日
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蒲以康, MA Jie, PU Yi-Kang
CHIN.PHYS.LETT. Vol. 20, No.9 (2003) 1527,-0001,():
-1年11月30日
By using a Langmuir probe, the electron energy distribution function (EEDF) is measured in inductively coupled plasma discharges in N2/Ar mixtures at 200W rf powers. In pure N2 discharges a Maxwellian EEDF is observed. When the mixing ratio of Ar increases, the distribution of high-energy electrons evolves with a dierent trend from that of low-energy electrons, resulting in an apparent "two temperature structure" of the EEDF We discuss this non-Maxwellian EEDF and its effect on the measurement and the interpretation of "electron temperature" by both the probe and line ratio technique.
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【期刊论文】The dependence of GaN growth rate on electron temperature in an ECR plasma
蒲以康, Yi-Kang Pu a, *, Yu-Feng Ren b, Si-Ze Yang b, Daniel Dywer c, Xiao-Guang, Zhang d, Xiou-Jun Jia d
Surface and Coatings Technology 131(2000)470-473,-0001,():
-1年11月30日
Experiments on the deposition of GaN thin films were carried out in an ECR plasma reactor using nitrogen gas and Trimethylgallium MG.as precursors. Electron temperature and nitrogen species adjacent to the substrate surface during deposition were measured by a CCD spectrometer. We observed an optimum electron temperature for the growth rate. The result suggests that tuning of electron energyor temperature. can be used to optimize the deposition and electron temperature near the substrate surface may be a candidate for one of the control parameters in plasma-assisted CVD.
GaN, Plasma-assisted CVD, Electron temperature
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【期刊论文】Study on an atmospheric pressure glow discharge
蒲以康, Xinxin Wang, Chengrong Li, Mingze Lu and Yikang Pu
Plasma Sources Sci. Technol. 12(2003)358-361,-0001,():
-1年11月30日
Experiments were performed on an atmospheric pressure glow discharge (APGD) in an air gap between two dielectric barrier electrodes. While it is possible to get an APGD in a 2mm air gap, it is possible to get only a filament discharge in a 5mm air gap. The development of an electron avalanche in such a gap was numerically simulated. It was found that the critical applied field for a 5mm electron avalanche to transit to a streamer is equal to 35.07kVcm-1. This calculated critical applied field is in good agreement with the experimental one. The experimental and theoretical results confirm that only a filament discharge, rather than a glow discharge, can be produced in an atmospheric pressure air gap that is not less than 5mm if it is not possible to lower the breakdown field of air. A resistive barrier discharge (RBD) was theoretically analysed and the development of RBD was numerically simulated. If a kilohertz discharge is required, the parameters of the resistive layer should be in the rangeρεr=(109-1011)Ωcm. APGD in a helium gap was realized using 50Hz line power with a suitably fabricated resistive layer.
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蒲以康, Wei He, Zhigang Guo, and Yikang Pu a), Luting Yan, and Wenjie Si
Appl. Phys. Lett., Vol. 85, No.6, 9 August 2004,-0001,():
-1年11月30日
Polymer coating on the surface of inorganic ceramic nanoparticles is beneficial to decrease agglomeration and improve dispersion in organic solvent in ceramic injection moulding technology. A layer of thin polymer film on zirconia nanoparticles is deposited by inductively coupled ethylene/nitrogen plasma. Transmission electron microscopy photographs indicate the presence of uniform polymer coatings and the thickness of the polymer layer is estimated as several nanometers. The chemical structure of the film is revealed as quasi-polyethylene long hydrocarbon chain by x-ray photoelectron spectroscopy examination.
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【期刊论文】Molecular Nitrogen Vibrational Temperature in an Inductively Coupled Plasma*
蒲以康, KANG Zheng-De, PU Yi-Kang
CHIN.PHYS.LETT. Vol. 19, No.2 (2002) 211,-0001,():
-1年11月30日
Using a technique applied previously to vibrationally excited molecular nitrogen (N*2) in the region of daytime and nighttime aurora, the emission intensity of the N2 second positive band system in an inductively coupled plasma (ICP) has been analysed and the vibrational temperature of nitrogen molecules in the ICP is thus determined. The result shows that the vibrational temperature increases with the increase of the neutral gas pressure from 0.04Pa to 10Pa, then decreases with the further increase of the pressure from 10Pa to 100Pa. Also, this is explained by using the Boltzmann relation between the vibrational temperature and the concentration of the vibrationally excited N*2 (X1+g) molecules.
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【期刊论文】Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium*
蒲以康, KANG Zheng-De, PU Yi-Kang
CHIN.PHYS.LETT. Vol. 19, No.8 (2002) 1139,-0001,():
-1年11月30日
A new technique, adding argon or helium into nitrogen plasma, has been used to regulate the electron temperature in an inductively coupled plasma. The electron temperature is determined by analysing the intensity ratio of two nitrogen spectrum lines. The results show that, when the total pressure is 0.7Pa, the electron temperature increases with the increase of the He partial pressure in He/N2 plasma, but the electron temperature decreases with the increase of the Ar partial pressure in Ar/N2 plasma. The regulation e ect of electron temperature is weaker in higher pressure N2/He plasma of 2.6Pa.
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蒲以康, Y.K. Puand W. Halverson, C. Petty, Do Smatlak, and R. Torti
Fev. Sci Instrum. 62 (1), January 1990,-0001,():
-1年11月30日
Experiments have been conducted on Constance B to study transport properties in electron cyclotron resonance (ECR) heated plasmas of high-charge-state neon ions. Measurements were made of confinement parallel and perpendicular to the magnetic field at heating frequencies of 10.5 and 14 GHz, and corresponding ECR magnetic field strengths. Although radial ion losses scaled approximately as B-2, the total particle confinement time was independent of magnetic field. Thus, higher current densities of mulficharged neon ions were extracted at higher ECR heating frequency and magnetic field.
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蒲以康, Yi-Kang Pu, ‡, Zhi-Gang Guo, Zheng-De Kang, Jie Ma, Zhi-Cheng Guan, Guang-Yu Zhang, and En-Ge Wang
Pure Appl. Chem., Vol. 74, No.3, pp. 459-464, 2002.,-0001,():
-1年11月30日
Emission spectroscopy is used to investigate the effect of inert gas mixing in nitrogen plasmas generated in inductively coupled plasma (ICP) and electron cyclotron resonance (ECR) plasma sources. Vacuum ultraviolet (VUV) emission of resonance lines is used to determine concentration of atomic nitrogen while electron temperature is obtained from optical emission spectra. It is found that electron temperature can be either raised or reduced effectively by mixing helium or argon in a nitrogen discharge. Electron-electron collisions and superelastic collisions involving metastable species are key factors in electron temperature tuning.
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