肖夏
超大规模集成电路互连布线系统;超宽带微波探测目标成像;MEMS设计与模拟
个性化签名
- 姓名:肖夏
- 目前身份:
- 担任导师情况:
- 学位:
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学术头衔:
博士生导师, 教育部“新世纪优秀人才支持计划”入选者
- 职称:-
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学科领域:
制糖技术
- 研究兴趣:超大规模集成电路互连布线系统;超宽带微波探测目标成像;MEMS设计与模拟
肖夏 女 教授,博导
研究方向1: 超大规模集成电路互连布线系统
研究方向2: 超宽带微波探测目标成像
研究方向3: MEMS设计与模拟
简介:
天津大学电子信息工程学院教授, 2002年3月毕业于德国开姆尼茨技术大学电子与信息技术学院,获博士学位。2002年4月至2003年3月为日本国立产业技术综合研究所先进半导体研究中心博士后。2006年8月受聘日本广岛大学纳米器件与系统研究中心客员教授。已发表学术论文60余篇,其中SCI检索16篇(SCI二区4篇),EI检索32篇,出版书籍1本,授权日本发明专利1项。SCI文章引用50余次。目前主要从事超大规模集成电路现代互连系统、超宽带微波成像检测乳腺肿瘤、MEMS的相关研究。
获奖情况:
1. 2008年入选教育部新世纪优秀人才;
2. 2008年度天津大学本科毕业设计优秀指导教师;
3. 第7届固态电子学与集成电路技术国际会议,优秀论文奖,2004年10月;
4. 多孔低介电常数薄膜的结构物性评价技术开发,日本MIRAI优秀奖,2003年4月。
主要社会学术兼职:美国电子电气工程师协会(IEEE)会员;中国电子学会高级会员;日本电子情报通讯学会会员;中国微米纳米技术学会会员;受邀为Materials Research Bulletin、Applied Surface Science、Chinese Physics Letters, IEEE BMEI, IEEE ICSICT, IEEE ICUWB IEEE ICCAS等国际期刊和会议审稿;国家自然科学基金等评审专家;担任IEEE ICSICT2010、IEEE ICUWB2010, IEEE ICIE2010/IWEEC2010技术委员会委员及SOPO2009, ICMMT2008等多个国际会议的分会场主席. 2006年8月受聘为日本广岛大学纳米器件与生命系统研究中心海外客员教授。
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1065
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成果阅读
328
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成果数
7
【期刊论文】Evaluating of Adhesion Property of ULSI Interconnect Films by the Surface Acoustic Waves *
肖夏, XIAO Xia**, SHAN Xing-Meng, LIU Ya-Liang
CHIN. PHYS. LETT. Vol. 27, No.1 (2010) 018502,-0001,():
-1年11月30日
The technique of surface acoustic waves (SAWs) is a very promising method for determining film properties such as Young’s modulus, density and film thickness nondestructively and accurately. The dispersion property of SAWs is also affected largely from the adhesion property of films, which is revealed by the bonding spring assumption described. This SAW method could offer a quantitative evaluation of the film adhesion from the curvature of SAW dispersion lines affected by the normal and shear spring constants. The method is applied to numerically characterize the adhesion property of the typical ultra-large-scale integrated circuit interconnect layered structure of a thin Cu film deposited on the Si substrate as well as a SiO2 thin film on a Si substrate.
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【期刊论文】Influence of the organism interface on the breast cancer detection by UWB
肖夏, Xia Xiao a, b, *, Takamaro Kikkawa a
Applied Surface Science 255(2008)597-599,-0001,():
-1年11月30日
Ultra-wide band (UWB) imaging technique is very attractive for the early breast cancer detection based on the obvious contrast in the electrical properties of malignant tumor to the normal fatty breast tissue. The tumor can be detected by analyzing the reflecting and scattering behavior of the UWB microwaves propagating in the breast. In this study, the influence of the organism interfaces is investigated from different cases of breast configuration involving different gland shapes as well as the tumor locations. Results show that the gland structure and tumor status have large influences on the reconstructed images generated from the detected signals due to the interface varieties. The tumor information in the proposed configurations can be obtained by series signal processing including eliminating the early time response of the detected signals caused by the direct wave and the reflection from the interface between the skin and the breast fat, and compensating the path loss of the propagating signal due to the radial spreading and the attenuation in the lossy breast. The location and the number of emitters and detectors affect the quality of the reconstructed image.
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【期刊论文】表征超大规模集成电路互连纳米薄膜硬度特性的声表面波的频散特性*
肖夏, 肖夏), 尤学一), 姚素英)
物理学报,2007,56(4):2428~2433,-0001,():
-1年11月30日
利用声表面波(SAW)的频散特性来表征超大规模集成电路(ULSI)互连系统中低介电常数(k)薄膜的物性具有准确、快速、对材料无损伤等突出优点。研究了Si(100)衬底上淀积低k薄膜的分层结构中,SAW沿任意方向传播的色散关系,引入坐标变换后,单层薄膜特征矩阵从9阶降到6阶,双层薄膜特征矩阵从15阶降到10阶,大幅度提高了计算速度,有利于生产ULSI过程中的在线监测。
超大规模集成电路,, 声表面波,, 传输方向,, 频散特性
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肖夏, Xia Xiao a, *, Xueyi You b
Applied Surface Science 253(2006)2958-2963,-0001,():
-1年11月30日
The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of the brittle low dielectric constant (low-k) thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure are derived in this study. The dispersion features of SAWs propagating on different structures of low-k/SiO2/Si substrate, SiO2/low-k/Si substrate, low-k/Si substrate, and low-k/Cu/Si substrate are investigated to instruct an accurate and facile fitting process for determining Young’s modulus of low-k films. The dependence of dispersion relation on the film thickness, elastic modulus of low-k materials as well as frequency are provided and discussed in detail. The study shows an obvious influence of layered structure on the dispersion relation of SAWs. For a fixed structure, the dispersion curvature increases with the decrease of Young’s modulus of low-k films.
Low-k, ULSI interconnection, Multi-layer, SAW, Young', s modulus
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肖夏, Xia Xiaoa, *, Xueyi Youb, Suying Yaoa
Microelectronics Journal 37(2006)1052-1055,-0001,():
-1年11月30日
The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of the fragile low dielectric constant (low-k) thin film used in the advanced ULSI multi-layer interconnects. The dispersion features of SAWs propagating on the layered structure of low-k/SiO2/Si substrate and low-k/Cu/Si substrate are investigated in detail. The influence of the film thickness on the dispersion curvature is provided as an instruction for an accurate and facile fitting process. Numerical results indicate that the mechanical property of low-k films is expected to determine effectively when the broadband frequency is up to 300 MHz.
Multi-layer interconnect, Low k, SAW, Young', s modulus
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【期刊论文】表面波表征ULSI互连布线双层薄膜机械特性的理论计算
肖夏, 姚素英, 阮刚
电子学报,2006,34(5):774~777,-0001,():
-1年11月30日
利用超声表面波在分层结构中传播的频散特性来测量薄膜的机械特性具有准确、快速、对材料无损伤等突出优点,本文研究了在Si(100)衬底上淀积双层薄膜的分层结构中超声表面波沿Si[110]晶向传播的速度-频率色散关系,应用此方法对超大规模集成电路(ULSI)中具有质软、易碎特点的低介电常数互连介质(low2k)薄膜的机械特性进行了表面波频散计算。研究了先进ULSI互连布线系统中广泛存在的3种分层薄膜结构上表面波的频散特性,计算表明不同分层结构对表面波的频散特性影响很大,对于同一分层结构,表面波的频散曲率随low2k薄膜杨氏模量的减小而显著增大,本工作为准确测定low2k薄膜的杨氏模量提供了理论计算依据。
超声表面波, low2k薄膜, 频散特性, 杨氏模量
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【期刊论文】超大规模集成电路互连系统的布线构造对散热的影响*
肖夏, 姚素英, 阮刚
半导体学报,2006,27(3):516~523,-0001,():
-1年11月30日
应用一个三层互连布线结构研究了诸多因素尤其是布线的几何构造对互连系统散热问题的影响,并对多种不同金属与介质相结合的互连布线的散热情况进行了详细模拟研究表明互连线上焦耳热的主要散热途径为金属层内的金属线和介质层中热阻相对小的路径因此互连系统的几何布线对系统散热具有重要影响在相同条件下,铝布线系统的温升约为铜布线的QA1/QA2倍此外,模拟了0113Lm工艺互连结构中连接功能块区域的信号线上的温升情况,探讨了几种用于改善热问题的散热金属条对互连布线的导热和附加电容的影响。
ULSI互连布线, 散热, 几何构造
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