Abnormal grain growth in thin Cu films on Si substrates has been investigated as a function of annealing time.Abnormal grains with (110) orientation were observed by transmission electron microscopy. X-ray diffraction patternsshowed that the films which underwent extensive abnormal grain growth also underwent a change in texture from (111)to (100), (110) and (311). A simple theoretical analysis showed that these were the results of a strain-energy-drivenabnormal grain growth process.

In this paper, the effects of grain orientation on preferred abnormal grain growth in metallic films with hcp ((c/a) <1.633)structure have been analyzed with respect to strain energy. The calculated results showed that the lower strain energy densitieswere corresponding to those grains with lower l and higher equaled h and k plane oriented parallel to the plane of the film surface.It was predicted that, from strain energy minimization solely, the preferred orientations or textures in metallic films with hcp(ec=aT < 1:633) structure, such as in a-Ti, a-Zr, a-Hf, Y and Rn, should be with lower l and higher equaled h and k.

In this paper, the effects of grain orientation on preferred abnormal grain growth in HCP-polycrystalline thin films have been analysed with respect to strain energy. The calculated results showed that Chkl, the average values of the orientation factor, decreased with increase of 1 for the same h and k and increased with increase of h or/and k for constant 1. Where (hkl) denoted a particular grain orientation, that is, the grains with (hkl) planes oriented parallel to the film surface. This is preannounced that, considering the strain energy solely, the grains with higher 1 and lower h and k should be favorable in HCP-polycrystalline thin films on rigid substrates after annealing.

Abnormal grain growth in thin Cu films on Si substrates has been investigated as a function of annealing time. Abnormal grains with (110) orientation were observed by transmission electron microscopy. X-ray diffraction patterns showed that the films which underwent extensive abnormal grain growth also underwent a change in texture from (111) to (100), (110) and (311). A simple theoretical analysis showed that these were the results of a strain-energy-driven abnormal grain growth process.

Abnomlal grain growth and texture change in both free standing and attached Ag and Cu fihns after annealing at 300℃ for 2h havebeen investigated with transmission electron microscopy (TEM) and X-ray diffraction (XRD). XRD texture analysis showed that both Ag and Cu fihns deposited on the (001)-oriented single crystal Si snbstrates had (111) and (100) donble fiber textures. 0/20 scmming XRD patterns showed that, after mmealing, the free standing Ag and Cu fihns showed a slight increase in the (111) texture, on the contrary, both Ag and Cu fihns attached on Si snbstrates showed an increase in (100) and (110) textures. Four anomalous large grains with same (211) orientation were observed in attached Cu fihns after annealing by TEM. The experimental resnlts have been explained satisfactorily from anisotropy of surface energy and strain energy.