应用一个三层互连布线结构研究了诸多因素尤其是布线的几何构造对互连系统散热问题的影响，并对多种不同金属与介质相结合的互连布线的散热情况进行了详细模拟研究表明互连线上焦耳热的主要散热途径为金属层内的金属线和介质层中热阻相对小的路径因此互连系统的几何布线对系统散热具有重要影响在相同条件下，铝布线系统的温升约为铜布线的QA1/QA2倍此外，模拟了0113Lm工艺互连结构中连接功能块区域的信号线上的温升情况，探讨了几种用于改善热问题的散热金属条对互连布线的导热和附加电容的影响。

利用超声表面波在分层结构中传播的频散特性来测量薄膜的机械特性具有准确、快速、对材料无损伤等突出优点，本文研究了在Si（100）衬底上淀积双层薄膜的分层结构中超声表面波沿Si[110]晶向传播的速度-频率色散关系，应用此方法对超大规模集成电路（ULSI）中具有质软、易碎特点的低介电常数互连介质（low2k）薄膜的机械特性进行了表面波频散计算。研究了先进ULSI互连布线系统中广泛存在的3种分层薄膜结构上表面波的频散特性，计算表明不同分层结构对表面波的频散特性影响很大，对于同一分层结构，表面波的频散曲率随low2k薄膜杨氏模量的减小而显著增大，本工作为准确测定low2k薄膜的杨氏模量提供了理论计算依据。

利用声表面波（SAW）的频散特性来表征超大规模集成电路（ULSI）互连系统中低介电常数（k）薄膜的物性具有准确、快速、对材料无损伤等突出优点。研究了Si（100）衬底上淀积低k薄膜的分层结构中，SAW沿任意方向传播的色散关系，引入坐标变换后，单层薄膜特征矩阵从9阶降到6阶，双层薄膜特征矩阵从15阶降到10阶，大幅度提高了计算速度，有利于生产ULSI过程中的在线监测。

The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of the fragile low dielectric constant (low-k) thin film used in the advanced ULSI multi-layer interconnects. The dispersion features of SAWs propagating on the layered structure of low-k/SiO2/Si substrate and low-k/Cu/Si substrate are investigated in detail. The influence of the film thickness on the dispersion curvature is provided as an instruction for an accurate and facile fitting process. Numerical results indicate that the mechanical property of low-k films is expected to determine effectively when the broadband frequency is up to 300 MHz.

The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of the brittle low dielectric constant (low-k) thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure are derived in this study. The dispersion features of SAWs propagating on different structures of low-k/SiO2/Si substrate, SiO2/low-k/Si substrate, low-k/Si substrate, and low-k/Cu/Si substrate are investigated to instruct an accurate and facile fitting process for determining Young’s modulus of low-k films. The dependence of dispersion relation on the film thickness, elastic modulus of low-k materials as well as frequency are provided and discussed in detail. The study shows an obvious influence of layered structure on the dispersion relation of SAWs. For a fixed structure, the dispersion curvature increases with the decrease of Young’s modulus of low-k films.