Abstract. Atomic force microscope (AFM) could be used as a micro-machining tool if it is equipped with a diamond tip instead of a normal imaging tip. Alternatively the AFM diamond tip could also be used as a nano-indeming tool following the micro-machining process in reatizing the measurement of the mechanical properties inside and outside the micro-machined region. The results show that tbr the AFM-based micro-machining with a diamond tip on chemical-mechanical polished silicon wafer, the deformed layer could be formed even under very small machining force, however it is smaller than the deformed layer formed by means of chemical-mechanical polishing. The hand-scaled hardness values of silicon measured by AFM are bigger than the hardness values measured by tradbionaI Vickers and Hysitron indenting tester. In addition, as the indenting loads decreases, the hand-scaled hardness values present a trend of increasing, which was considered due to the indenting size effect under very small indenting loads.

bstract. In this paper, micro machining is performed using AFM diamond lip, which is similar to a gin abrasive particle, and a high precision stage. Using mechanical scratching, microstructures are maehined on the surface of single crystal copper. Based on the system, some experimenls are carried out: parameters such as velocity of machining, applied force and amount of feed, which will influence procass of micro machining, are analyzed. The diamond tip state's influence on micro machining is also studied. And using the optimum parameters and proper machinin technique, the microstructures are machined. This approach is a no,.el unconventional micro machining technology. It can be applied in some micro machining fields such as: MEMS micro deqces' fabrication, mask fabrication of ulithography, micro pars micro machining, and machining or dressing on the micro-parts fabricaled by other ways.

Traditional micromachining methods arc are difficult to achieve three-dimensional machining of microstructurcs. To solve this problem. a 3D machining method based on a SPM and a precision stage is proposed, in which the diamond tip of the SPM is used to scratch the sample surface. Bused on the two-dimensional machining technique, the 3D machining technique was bstudied. The machining mechanism and machining prperties of the microstructuresat were investigated. Different SPM working modes were also studied. The microstructures were The method provide a new way for manufacturing the 3D icrostructures such as the moulds of micro of micro sensors and micro parts.

Based on the geometrical features of the AFM (Atomic Force Microscope) diamond tip as well as the interac-tion existed between the diamond tip and the machined material, a theoretical model egarding single asperity cutting is put lobar th The experiments are conducted on various materials including AI-althy, single ctystaI germanium and silicon with differnt normal loads and cutting speed. On the basis of the theoretical analysis verified with the experimental re-suits, a study of cuttthg process on llano-scale in tern of cutting force and various material removal mechanism is carded out

采用分子动力学三维模型研究单晶硅纳米切削机理，工件原子间相互作用力和二件与刀具原子问相互作用力分别采用Tersoff势和Mores势计算。通过切削过程甲瞬间原子图像、能量和切削力的分析，发现在整个切削过程中，发生了非晶态相位的变和切屑体积的改变，但没有明显的位错和弹性恢复产生。其中切削力的一个分力以句力在非晶态相住变换形成时起主要作用，另一分力轴向力是非晶态扩展的三要素。兰晶硅纳米切削机理不是位错在晶体中运动产生的塑性变形，而是非晶相相枉之援产生的变形。