成果题名:Design, fabrication and characterization of MEMS probe card for fine pitch IC testing
作者: Tao Yuan, Di Chen, Jingdong Chen, Hualin Fu, Steffen Kurth, Thomas Otto and Thomas Gessner
成果题名:Design, fabrication and characterization of MEMS probe card for fine pitch IC testing
作者: Tao Yuan, Di Chen, Jingdong Chen, Hualin Fu, Steffen Kurth, Thomas Otto and Thomas Gessner
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