成果题名:Formation and characterization of Si5C3 type silicon carbide by carbon ion implantation with a MEVVA ion source
作者: L.B. Guo a, Y.L. Wang a, F. Song b, F. He a, Y. Huang a, L.H. Yan b, Y.Z. Wan a,*
成果题名:Formation and characterization of Si5C3 type silicon carbide by carbon ion implantation with a MEVVA ion source
作者: L.B. Guo a, Y.L. Wang a, F. Song b, F. He a, Y. Huang a, L.H. Yan b, Y.Z. Wan a,*
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