SiC基α粒子的像素探测器仿真与优化
首发时间:2024-04-26
摘要:像素探测器的位置分辨率与像素间距和像素尺寸密切相关。当像素尺寸固定后,虽然采用缩小像素间距的方法来进一步提位置分辨率,但会给器件工艺和后端电子学带来挑战。考虑到两个像素点之间的间隔,如果也可以对α粒子的入射位置进行分辨,则可以大大提升探测器的有效探测面积。像素探测器的有效探测面积是指探测器能够有效成像的表面积,由于存在像素间隔、像素探测器边缘等因素,因此像素探测器的有效探测面积总是小于总面积的。基于以上问题,设计了一款能对非像素区进行位置分辨的像素探测器,利用TCAD仿真软件模拟了在像素尺寸为3mm×3mm和像素间隔为2mm,施加的反向偏压为100V的条件下,α粒子以5.5MeV的能量入射非电极区,计算对相邻的两个电极产生的脉冲电流进行积分得到了积分电荷。通过对多组平行实验的实验数据进行拟合得出经验公式,实现了非探测区域的位置分辨。仿真结果表明:在像素尺寸和像素间隔同等固定前提下,有效探测面积提升了38.4%。
关键词: 肖特基电极 辐照探测器 位置分辨 TCAD仿真模拟
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Simulation and optimization of pixel detectors for SiC-based α-particles
Abstract:The positional resolution of a pixel detector is closely related to the pixel pitch and pixel size. When the pixel size is fixed, reducing the pixel pitch to further improve the position resolution poses challenges to the device process and back-end electronics. Considering the spacing between two pixel points, the effective detection area of the detector can be greatly enhanced if the incident position of alpha particles can also be resolved. The effective detection area of a pixel detector is the surface area of the detector that can be effectively imaged, and the effective detection area of a pixel detector is always smaller than the total area due to the presence of pixel spacing, pixel detector edges, and other factors. Based on the above problems, a pixel detector capable of positional resolution of the non-pixel region was designed, and the TCAD simulation software was used to simulate the incident of α-particles into the non-electrode region with an energy of 5.5 MeV under the conditions of pixel size of 3 mm×3 mm and pixel spacing of 2 mm, and an applied reverse bias of 100 V. The integration of the pulsed currents generated by the two neighboring electrodes was computed to obtain an integral Charge. The empirical formula was derived by fitting the experimental data from several sets of parallel experiments to realize the positional resolution of the non-detected region. The simulation results show that the effective detection area is improved by 38.4% with the pixel size and pixel spacing equally fixed.
Keywords: Schottky electrode Pixel detector Position resolution TCAD simulation
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