Nano machining technique based on SPM is newly advanced technique of manufacture. It Ls a non-traditional machining method Based on summarzing nano machining techniques using SPM recent years, our team's works in this field have been presented. Processing technique of CF Target Capsule's micro inflation hole using AFM which is one of SPM's modes, is studied. And processing properties of bdttle-matnflal, single crystal Ge, is also investigated. A micro machining system is established combing AFM and the high precision stage together. This system is used to machine microstructures and micro parts. A new method for machining two-dimensional and three-dimensional microstructures is, revealed It solves some problems which other micro machining methods can not solve or are dif-cutt to solve So it is an advanced techniaue of manufacture with a good outlook.