Electroencephalogram (EEG) has been one of the important means to study brain functions and diseases.We fabricated an innovative MEMS elastic-based dry electrode using photolithography and electroforming process.The pitch of elastic-based dry electrode tip is 100 lm.We adopted polydimethylsiloxane as an elastic layer which provides the flexibility when the conductive layer and the electrode tip contact with the skin. This kind of dry electrode array does not need conductive gel during testing procedure. Compared with the traditional Ag/AgCl wet electrode, it greatly reduced the preparation time for EEG measurement and it could make the examinee more comfortable.