In this paper, ZnO nanoparticle photocatalysts were modified by depositing Pd on their surfaces with a photoreduction method. We mainly investigated the modification mechanisms as well as the effects on the photocatalytic activity of ZnO nanoparticles of deposited Pd by means of XPS and SPS (Surface Photovoltage Spectroscopy), and the effects of Pd content on SPS responses were also discussed from the point of the electronic energy level. The results showed that the content of crystal lattice oxygen on the surface of ZnO nanoparticle decreased after an appropriate amount of Pd was deposited, while that of adsorbed oxygen increased, indicating that Pd was mainly deposited on the crystal lattice oxygen. At the same time, the intensity of SPS responses of ZnO nanoparticles remarkably decreased. In addition, the activity of ZnO nanoparticles could be greatly improved by depositing an appropriate amount of Pd in the gas phase photocatalytic oxidation of n-C7H16. Thus, it could be concluded that the increase in surface content of adsorbed oxygen could facilitate the photocatalytic reaction, and there were close relationships between the SPS response and photocatalytic activity, i.e. the weaker the SPS response, the higher the photocatalytic activity, of Pd-deposited ZnO nanoparticles.