The perpendicular magnetic properties of NdFe alloy thin films have been studied on samples prepared by the facing targets sputtering method at a substrate temperature of 240-270 C. All the films with Nd content over 35 at.% exhibit perpendicular magnetic anisotropy. The Curie and crystalline temperatures were about 400 K and 630 K, respectively. The x-ray diffraction patterns show that the uniaxial anisotropy of a NdFe film has a certain relation to the partial oxidation of Nd in the film. The direction of the magnetic easy axis is determined by the orientation of C-Nd203; (440)-oriented C-Nd203 contributes to the formation of a perpendicular magnetic film. It is proposed that the partial oxidation of Nd may induce some short range atomic order in NdFe films.