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引用
期刊论文
Structural and magnetic properties of Fe-N gradient thin films
Journal of Magnetism and Magnetic Materials 140-144(1995)719-720,-0001,():
Fe-N gradient thin films are fabricated by a facing targets sputtering (F-f S) system. Rutherford backscattering spectrometry shows that the concentration of Fe atoms or N atoms varies gradually from the substrate to the surface of the film. The Fe-N gradient films contain crystal phases of ζ-Fe2N, ε-FexN (2<x<3), γ'-Fe4N and α"-Fe16N2, and amorphous FeN as well, according to different sputtering conditions.
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