An optimal allocation model for the subprocessing-element (sub-PE) level redundancy is developed, which is solved by the genetic algorithms. In the allocation model, the average defect density D and the parameter δ are also considered in order to accurately analyze the element yield, where δ is defined as the ratio of the support circuit area to the total area of a PE. When the PE’s area is imposed on the constraint, the optimal solutions of the model with different D and δ are calculated. The simulation results indicate that, for any fixed average defect density D, both the number of the optimal redundant sub-circuit added into a PE and the PE’s yield decrease as δ increases. Moreover, for any fixed parameter δ, the number of the optimal redundant sub-circuit increases, while the optimal yield of the PE decreases, as D increases.