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Integration of wavelength signal divider and infrared photodetectors based on the plasma dispersion effect in SiGe/Si

李宝军Baojun Li a) Zuimin Jiang Chengwen Pei Jie Qin and Xun Wang Guozheng Li Jianjun Wan and Enke Liu

Appl. Phys. Lett., Vol. 74, No.12, 22 March 1999,-0001,():

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摘要/描述

Based on the plasma dispersion effect, a single-mode SiGe wavelength signal divider (WSD) integrated with infrared photodetectors for optical communication at the wavelengths of 1.3 and 1.55μm is proposed and fabricated by molecular beam epitaxy. The device performances are measured. The crosstalks of the WSD at a forward modulation bias of 1.2 V are -25 and -18 dB at 1.3 and 1.55μm, respectively. The insertion losses are 2.01 and 2.64 dB for 1.3 and 1.55μm, respectively. At -5 V reverse bias, the dark currents of the detectors at the 1.3 and 1.55μm output branches are 45 and 64 nA, respectively. Photocurrent responsivities of 0.08 and 0.07 A/W for the two detectors at the 1.3 and 1.55μm output branches have been achieved. The quantum efficiencies of the whole WSD and detector integration system are estimated to be about 19% and 18.2% for the 1.3 and 1.55μm output branches, respectively.

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