Highly textured MgO films were grown by the inclined-substrate deposition (ISD) technique at a high deposition rate. A columnar grain with a roofing-tile-shaped surface was observed in these MgO films. X-ray pole figure, and/-and x-scan were used to characterize in-plane and out-of-plane textures. MgO films deposited when the incline angle a was 55 and 30 exhibited the best in-plane and out-of-plane texture, respectively. High-quality YBCO films were epitaxially grown on ISD-MgO-buffered Hastelloy C substrates by pulsed laser deposition. Tc/88K, with sharp transition, and jc values of 2105 A/cm2 at 77K in zero field were observed on films 5mm wide and 1cm long. This work has demonstrated that biaxially textured ISD MgO buffer layers deposited on metal substrates are excellent candidates for fabrication of high-quality YBCO coated conductors.