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期刊论文
Dependence of Electrically Induced Strain on Orientation and Composition in Pb (ZrxTi1-x)O3 Films
Jpn. J. Appl. Phys. Vol. 38 (1999) pp. 4843-4846,-0001,():
The effect of orientation and composition on electrically induced strain and relative permittivity of 600-nm-thick Pb(Zrx Ti1-x)O3 (PZT) films was investigated. High permittivity was obtained near the morphotropic phase boundary (MPB) composition, unaffected by orientation. For films with mixed textures of [111] and [100], the electrically induced strain was maximum near the MPB composition. While the electrically induced strain showed a tendency to increase with increasing Zr concentration x in the films with [111] preferred orientation, for the Pb (Zr0.65Ti0.35)O3 film with [111] preferred orientation, an electrically induced strain of 0.54% was obtained under an electric field of 250kV/cm.
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