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期刊论文

Formation of Arrays of Straight Copper Wires on Solid Substrate by Electrodeposition

王牧Sheng Zhong Mu Wang* Xiao-Bo Yin Jian-Ming Zhu Ru-Wen Peng Yuan Wang and Nai-Ben Ming

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摘要/描述

Straight copper wire arrays are electrochemically deposited on a silicon substrate without utilizing additives or templates. To suppress the influence of the factors which arouse the ramification of the copper electrodeposit, an ultrathin electrochemical deposition system and an initially homogeneous electric field are used. The width of the copper wires may vary from about 200nm to about 1.5μm depending on the control parameters. The microstructure of the copper wires and their electric resistance after vacuum-annealing at 200℃ are studied. We suggest that this self-organized copper electrodeposition is helpful in gaining an understanding of the formation of dense-branching morphology. It also implies the potential application in microelectronics.

【免责声明】以下全部内容由[王牧]上传于[2006年02月21日 17时19分27秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。

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