The visualization and interaction of the photolithography simulation result is useful and challenging. We introduce algorithms that include an automatic sorting algorithm, a transformation model and a dynamic loading algorithm to visualize the large-scale photolithography simulation data in three dimensions in real-time. The automatic sorting algorithm is presented to resort the data output by simulator. And the transformation model converts light intensity data into depth data for 3D modelling. Moreover, the dynamic loading algorithm realizes the out of core visualization. The experimental results demonstrate that our algorithms are effective for photolithography simulation data with 3D largescale interactive visualization in real-time.