The continuous synchronous composite (CSC) process is a new technique, the preparation of reinforcement-phase accompanied simultaneously the deposition of SiC matrix, based on CVI principles for fabrication of ceramic matrix composites. In the CSC process, there was a gradient temperature field on the surface of the graphitic substrate, consisting of high (1000-1200℃), intermediate (900-1000℃) and low (700-900℃) temperature regions, by a bottom heating-element. Following the rotating substrate, micro-pores were well infiltrated in the intermediate temperature regions by gas diffusion transport, and macro-pores were rapidly filled with SiC in the high temperature regions by gas flow transport, respectively. In the present paper, 2-dimension carbon cloth reinforced SiC composites was fabricated by CSC process, and the microstructure, deposition rate and conversion efficiency of methyltrichlorosilane (MTS) were investigated. The densification of C/SiC composites was uniform, and the highest deposition rate within macro-pores was 25μm h−1, and the conversion efficiency of MTS varied from 11% to a maximum of 27%.