您当前所在位置: 首页 > 学者

苑伟政

  • 28浏览

  • 0点赞

  • 0收藏

  • 0分享

  • 134下载

  • 0评论

  • 引用

期刊论文

The Study on Suspension for Micromachined Comb Drive Tuning Fork Gyroscope

苑伟政Chang Honglong Yuan Weizheng

,-0001,():

URL:

摘要/描述

In this paper, we analyzed two suspensions for micromachined comb drive tuning fork gyroscope to find which one is more suitable for higher performance gyroscope. Firstly, the simplified models of the two complex suspensions were presented to get the analytical expressions for the spring constant. Secondly, the modal analysis based on numerical finite element method was carried out to verify the simplified model and determine the final design of the suspension. Finally we fabricated the two gyroscopes in dissolved wafer process and took an actual test. The results showed that type1 suspension has lower spring constant than type2 under the same conditions. And the corresponding gyroscope having lower frequency has bigger scale factor and lower nonlinearity and better bias stability than the type2 one who has the higher frequency under the same test conditions.

【免责声明】以下全部内容由[苑伟政]上传于[2005年01月19日 18时08分39秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。

我要评论

全部评论 0

本学者其他成果

    同领域成果