A SiC light-activated Darlington heterojunction transistor is proposed for anti-EMI (electromagnetic interference) applications, in which a monolithically integrated SiCGe/SiC pn heterojunction photodiode is employed to produce a light-induced base current for triggering the transistor. Performance of the proposed light-activated power switch was simulated using MEDICI tools. Feasibility of the proposal is confirmed by its good light-activation characteristics obtained from the simulation. The simulation also demonstrates that good I-V characteristics with a light-independent turn-on voltage knee of about 5 V may be achievable to the light-activated power switch has.

SiCGe/SiC heterojunction structure is required in development of SiC optoelectronic devices and light-activated switching devices. We present in this paper a primary attempt to grow the ternary alloy SiCGe on SiC substrates under varied growth conditions in a conventional hot-wall CVD system. SiH4, GeH4 and C3H8 were employed as silicon, germanium and carbon sources, respectively. The samples were measured by means of SEM, XPS, XRD, optical absorption, etc. Two different growth modes i.e., island growth and porous growth were observed. It has been shown that germanium atoms can be effectively incorporated into the ternary alloys, which makes their optical gaps to be narrowed with increasing Ge content. However, incorporation of Ge induces a heavy lattice mismatch, which limits the film thickness by the formation of mismatch defects. It has been shown that use of a buffer layer can effectively improve the growth quality of the ternary alloy.

Intense photoluminescence (PL) from porous-like SiC has been observed at room temperature. The samples were prepared by electrochemical anodization from nanocrystalline SiC thin films grown on Si (100) substrates in hot filament chemical vapor deposition. It has been found that a light-induced enhancement of the PL intensity will take place if the incident light beam from an He-Cd laser (325nm, 10mW) is employed for the excitation. Blue-shift of the PL peak energy from about 1.9 eV of as-anodized samples to about 2.1 eV and an accompanied spectral widening have also been observed for a long enough irradiation time. However, the novel effects have not been observed at low temperature. Origin of the light-induced change is suggested to be related to some light-induced metastable defects.

Intense wide-band photoluminescence (PL) with high stability to ultraviolet (UV) light irradiation has been observed in a wide temperature range from a polycrystalline SiC sintered from graphite and melt Si at high temperature over 1500

Growth of SiCGe temary alloy on 6H-SiC in a conventional hot-wall CVD system was initially studied. SiH4, GeH4 and C3H8 were employed as silicon, germanium and carbon source, respectively, while H2 was employed as the carner gas. To reduce the heavy lattice mismatch between the film and the substrate, a 3C-SiC buffer layer was inserted between them in a CVD process. Optimizing the growth conditions was discussed. The samples were measured by means of SEM, SAXRD (Small Angle X-Ray Diffraction). It is shown that use of the 3C-SiC buffer layer is an effective way to improve quality of the ternary alloy.