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【期刊论文】Monte Carlo simulations of coaxial backscattered electrons in SEM
蒋昌忠, N. Rosenberg*, C.Z. Jiang, P. Morin
Ultramicroscopy 76(1999)97-105,-0001,():
-1年11月30日
We simulate the trajectories of backscattered electrons within a SEM of particular detection geometry which is adapted to topographic contrast attenuation and Z atomic number contrast enhancement. The calculations are performed choosing the different experimentally possible conditions as regards the primary electron energy, the detector aperture angle and the energy window of the detected electrons. From such simulations, it is possible to deduce the backscattering coe
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