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2009年03月24日
【期刊论文】A new type of scanning electron microscope using the coaxial backscattered electrons
蒋昌忠， C.Z. Jiang a， b， *， P. Morin c， N. Rosenberg b
Micron 33(2002)69-74，-0001，（）：
-1年11月30日
A new coaxial detection system for backscattered electrons in SEM is described. This coaxial detection system allows us to collect only the backscattered electrons that have lost a small percentage of the primary energy, emerging from the sample surface with a take-off angle de
Scanning electron microscope， Backscattered electron， Coaxial detection， Monte Carlo simulation， Backscattering coeffcient， Composition analysis
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