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王万录, B. B. Wang, W. L. Wang, * K. J. Liao, and J. L. Xiao
,-0001,():
-1年11月30日
Diamond nucleation by biased hot filament chemical vapor deposition was investigated by scanning electron microscopy and atomic force microscopy. It was found that a number of microdefects were produced on a substrate surface owing to energetic ion bombardment under negative substrate bias, which increased with increasing negative bias. The nucleation density was enhanced with an increase of negative bias. During diamond nucleation, a purple glow was observed when the negative bias was increased to a critical value. At the onset of glow discharge, the process of diamond nucleation on a silicon surface by biased hot filament chemical vapor deposition was theoretically studied by analysis of the experimental results of diamond nucleation. The relationship among the number of active ions, the microdefects, and nucleation density with negative bias was given by reasonable analytic formulas. The effect of negative bias on ion diffusion on the substrate surface was theoretically researched and deduced. The influence of negative bias on the bond strength of diamond nuclei on the substrate was analyzed theoretically. The adhesion force between diamond nuclei and the substrate surface was measured by means of the scratch surface method, which was in accord with theoretical consideration. The results indicated that the theoretical calculation was in agreement with experimental results.
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王万录, W.L. Wang a, *, R.Q. Zhang b, K.J. Liao b, Y.W. Sun a, B.B. Wang a
Diamond and Related Materials 9(2000)1660-1663,-0001,():
-1年11月30日
Nucleation and growth of diamond films on aluminum nitride (ALN) coatings were investigated by scanning electron microscopy, Raman spectroscopy and scratch test. ALN films were grown in a magnetron sputtering deposition. The substrates were Si(111) and tungsten carbide (WC). Chemical vapor deposition (CVD) diamond films were deposited on ALN films by hot filament CVD. The nucleation density of diamond on ALN films was found to be approximately 10 5cm 2, whereas over 10 10cm2 after negative bias pre-treatment for 35min was 320V, and 250mA. The experimental studies have shown that the stresses were greatly minimized between diamond overlay and ALN films as compared with WC substrate. The results obtained have also confirmed that the ALN, as buffer layers, can notably enhance the adhesion force of diamond films on the WC.
Aluminum nitride films, Diamond films, Hot filament chemical vapor deposition, Nucleation
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王万录, B.B. Wang, W.L. Wang*, K.J. Liao
Thin Solid Films 401(2001)77-83,-0001,():
-1年11月30日
The process of diamond nucleation by hot filament chemical vapor deposition was investigated by atomic force microscopy. It was observed that a large number of micro-defects (pits) were produced on the surface of the silicon substrate due to ion bombardment under the negative potential and diamond nucleated on the pits. The formation of the pits and their role in diamond nucleation were theoretically approached. The results indicate that the number of the pits increased with increasing potential, the diamond nucleation density and the nucleation rate were functions of the pits, and they were in agreement with the experiment results.
Chemical vapor deposition, Ion bombardment, Diamond, Nucleation
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王万录, Zheng Li, Hai Yang Bai, a) Ming Xiang Pan, and De Qian Zhao, Wan Lu Wang, Wei Hua Wang
J. Mater. Res., Vol. 18, No.9, Sep 2003,-0001,():
-1年11月30日
The Pr55-xAl12+xFe33−yCuy (0≤x≤5, 0≤y≤8) bulk metallic glasses (BMGs) 5mm in diameter and 100 mm in length were prepared by copper mold suction casting. Hysteresis loops of the Pr55−xAl12+xFe33−yCuy BMGs and the corresponding Pr55Al12Fe30Cu3 crystallized alloy were measured, and the results showed that the Pr55−xAl12+xFe33−yCuy BMGs are hard magnetic, while the completely crystallized Pr55Al12Fe30Cu3 alloy is paramagnetic at room temperature. The thermal behavior and crystallization of the Pr55Al12Fe30Cu3 BMG were studied by differential scanning calorimetry, and the results indicated that the Pr-based BMG has obvious glass transition and a wide supercooled liquid region up to 75K. The crystallization activation energy for the Pr55Al12Fe30Cu3 BMG is much smaller than that of Zr-Ti-Cu-Ni-Be BMG.
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【期刊论文】Magnetoresistive effect in p-type semiconducting diamond films
王万录, C. Y. Kong, W. L. Wang, a) K. J. Liao, S. X. Wang, and L. Fang, Y. Ma
J. Appl. Phys., Vol. 91, No.5, 1 March 2002,-0001,():
-1年11月30日
Magnetoresistive effects were studied in p-type heteroepitaxial diamond films with a strip or Corbino disk structure in a magnetic field ranging from 0 to 5 T. The films were grown by microwave plasma chemical vapor deposition and boron doped by cold ion implantation and rapid thermal annealing. The experimental results show that the magnetoresistance (MGR) of p-type heteroepitaxial diamond films strongly depends on the geometric form of the samples and the magnetic field. Diamond films are assumed to be an isotropic isothermal solid in which conduction is by holes from light, heavy and split-off bands. Based on the Fuchs and Sondheimer thin-film theory, considering spherical energy surfaces and mixed scattering by lattice vibrations and ionized impurities and surface, a theoretical description of the magnetoresistive effect in diamond films is presented by solving the Boltzmann transport equation in the relaxation time approximation. A relationship between the MGR and the thickness of films, magnetic field, and mobility is shown.
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