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【期刊论文】Tuning the electron temperature of a nitrogen plasma by adding helium and argon
蒲以康
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-1年11月30日
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【期刊论文】Molecular Nitrogen Vibrational Temperature in an Inductively Coupled Plasma*
蒲以康, KANG Zheng-De, PU Yi-Kang
CHIN.PHYS.LETT. Vol. 19, No.2 (2002) 211,-0001,():
-1年11月30日
Using a technique applied previously to vibrationally excited molecular nitrogen (N*2) in the region of daytime and nighttime aurora, the emission intensity of the N2 second positive band system in an inductively coupled plasma (ICP) has been analysed and the vibrational temperature of nitrogen molecules in the ICP is thus determined. The result shows that the vibrational temperature increases with the increase of the neutral gas pressure from 0.04Pa to 10Pa, then decreases with the further increase of the pressure from 10Pa to 100Pa. Also, this is explained by using the Boltzmann relation between the vibrational temperature and the concentration of the vibrationally excited N*2 (X1+g) molecules.
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蒲以康, Yi-Kang Pu, ‡, Zhi-Gang Guo, Zheng-De Kang, Jie Ma, Zhi-Cheng Guan, Guang-Yu Zhang, and En-Ge Wang
Pure Appl. Chem., Vol. 74, No.3, pp. 459-464, 2002.,-0001,():
-1年11月30日
Emission spectroscopy is used to investigate the effect of inert gas mixing in nitrogen plasmas generated in inductively coupled plasma (ICP) and electron cyclotron resonance (ECR) plasma sources. Vacuum ultraviolet (VUV) emission of resonance lines is used to determine concentration of atomic nitrogen while electron temperature is obtained from optical emission spectra. It is found that electron temperature can be either raised or reduced effectively by mixing helium or argon in a nitrogen discharge. Electron-electron collisions and superelastic collisions involving metastable species are key factors in electron temperature tuning.
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蒲以康, Y.K. Puand W. Halverson, C. Petty, Do Smatlak, and R. Torti
Fev. Sci Instrum. 62 (1), January 1990,-0001,():
-1年11月30日
Experiments have been conducted on Constance B to study transport properties in electron cyclotron resonance (ECR) heated plasmas of high-charge-state neon ions. Measurements were made of confinement parallel and perpendicular to the magnetic field at heating frequencies of 10.5 and 14 GHz, and corresponding ECR magnetic field strengths. Although radial ion losses scaled approximately as B-2, the total particle confinement time was independent of magnetic field. Thus, higher current densities of mulficharged neon ions were extracted at higher ECR heating frequency and magnetic field.
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【期刊论文】Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium*
蒲以康, KANG Zheng-De, PU Yi-Kang
CHIN.PHYS.LETT. Vol. 19, No.8 (2002) 1139,-0001,():
-1年11月30日
A new technique, adding argon or helium into nitrogen plasma, has been used to regulate the electron temperature in an inductively coupled plasma. The electron temperature is determined by analysing the intensity ratio of two nitrogen spectrum lines. The results show that, when the total pressure is 0.7Pa, the electron temperature increases with the increase of the He partial pressure in He/N2 plasma, but the electron temperature decreases with the increase of the Ar partial pressure in Ar/N2 plasma. The regulation e ect of electron temperature is weaker in higher pressure N2/He plasma of 2.6Pa.
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