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【期刊论文】Study on an atmospheric pressure glow discharge
蒲以康, Xinxin Wang, Chengrong Li, Mingze Lu and Yikang Pu
Plasma Sources Sci. Technol. 12(2003)358-361,-0001,():
-1年11月30日
Experiments were performed on an atmospheric pressure glow discharge (APGD) in an air gap between two dielectric barrier electrodes. While it is possible to get an APGD in a 2mm air gap, it is possible to get only a filament discharge in a 5mm air gap. The development of an electron avalanche in such a gap was numerically simulated. It was found that the critical applied field for a 5mm electron avalanche to transit to a streamer is equal to 35.07kVcm-1. This calculated critical applied field is in good agreement with the experimental one. The experimental and theoretical results confirm that only a filament discharge, rather than a glow discharge, can be produced in an atmospheric pressure air gap that is not less than 5mm if it is not possible to lower the breakdown field of air. A resistive barrier discharge (RBD) was theoretically analysed and the development of RBD was numerically simulated. If a kilohertz discharge is required, the parameters of the resistive layer should be in the rangeρεr=(109-1011)Ωcm. APGD in a helium gap was realized using 50Hz line power with a suitably fabricated resistive layer.
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蒲以康, MA Jie, PU Yi-Kang
CHIN.PHYS.LETT. Vol. 20, No.9 (2003) 1527,-0001,():
-1年11月30日
By using a Langmuir probe, the electron energy distribution function (EEDF) is measured in inductively coupled plasma discharges in N2/Ar mixtures at 200W rf powers. In pure N2 discharges a Maxwellian EEDF is observed. When the mixing ratio of Ar increases, the distribution of high-energy electrons evolves with a dierent trend from that of low-energy electrons, resulting in an apparent "two temperature structure" of the EEDF We discuss this non-Maxwellian EEDF and its effect on the measurement and the interpretation of "electron temperature" by both the probe and line ratio technique.
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【期刊论文】The dependence of GaN growth rate on electron temperature in an ECR plasma
蒲以康, Yi-Kang Pu a, *, Yu-Feng Ren b, Si-Ze Yang b, Daniel Dywer c, Xiao-Guang, Zhang d, Xiou-Jun Jia d
Surface and Coatings Technology 131(2000)470-473,-0001,():
-1年11月30日
Experiments on the deposition of GaN thin films were carried out in an ECR plasma reactor using nitrogen gas and Trimethylgallium MG.as precursors. Electron temperature and nitrogen species adjacent to the substrate surface during deposition were measured by a CCD spectrometer. We observed an optimum electron temperature for the growth rate. The result suggests that tuning of electron energyor temperature. can be used to optimize the deposition and electron temperature near the substrate surface may be a candidate for one of the control parameters in plasma-assisted CVD.
GaN, Plasma-assisted CVD, Electron temperature
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【期刊论文】Molecular Nitrogen Vibrational Temperature in an Inductively Coupled Plasma*
蒲以康, KANG Zheng-De, PU Yi-Kang
CHIN.PHYS.LETT. Vol. 19, No.2 (2002) 211,-0001,():
-1年11月30日
Using a technique applied previously to vibrationally excited molecular nitrogen (N*2) in the region of daytime and nighttime aurora, the emission intensity of the N2 second positive band system in an inductively coupled plasma (ICP) has been analysed and the vibrational temperature of nitrogen molecules in the ICP is thus determined. The result shows that the vibrational temperature increases with the increase of the neutral gas pressure from 0.04Pa to 10Pa, then decreases with the further increase of the pressure from 10Pa to 100Pa. Also, this is explained by using the Boltzmann relation between the vibrational temperature and the concentration of the vibrationally excited N*2 (X1+g) molecules.
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蒲以康, Y.K. Puand W. Halverson, C. Petty, Do Smatlak, and R. Torti
Fev. Sci Instrum. 62 (1), January 1990,-0001,():
-1年11月30日
Experiments have been conducted on Constance B to study transport properties in electron cyclotron resonance (ECR) heated plasmas of high-charge-state neon ions. Measurements were made of confinement parallel and perpendicular to the magnetic field at heating frequencies of 10.5 and 14 GHz, and corresponding ECR magnetic field strengths. Although radial ion losses scaled approximately as B-2, the total particle confinement time was independent of magnetic field. Thus, higher current densities of mulficharged neon ions were extracted at higher ECR heating frequency and magnetic field.
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