已为您找到该学者7条结果 成果回收站
【期刊论文】表征超大规模集成电路互连纳米薄膜硬度特性的声表面波的频散特性*
肖夏, 肖夏), 尤学一), 姚素英)
物理学报,2007,56(4):2428~2433,-0001,():
-1年11月30日
利用声表面波(SAW)的频散特性来表征超大规模集成电路(ULSI)互连系统中低介电常数(k)薄膜的物性具有准确、快速、对材料无损伤等突出优点。研究了Si(100)衬底上淀积低k薄膜的分层结构中,SAW沿任意方向传播的色散关系,引入坐标变换后,单层薄膜特征矩阵从9阶降到6阶,双层薄膜特征矩阵从15阶降到10阶,大幅度提高了计算速度,有利于生产ULSI过程中的在线监测。
超大规模集成电路,, 声表面波,, 传输方向,, 频散特性
-
48浏览
-
0点赞
-
0收藏
-
0分享
-
130下载
-
0
-
引用
肖夏, Xia Xiao a, *, Xueyi You b
Applied Surface Science 253(2006)2958-2963,-0001,():
-1年11月30日
The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of the brittle low dielectric constant (low-k) thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure are derived in this study. The dispersion features of SAWs propagating on different structures of low-k/SiO2/Si substrate, SiO2/low-k/Si substrate, low-k/Si substrate, and low-k/Cu/Si substrate are investigated to instruct an accurate and facile fitting process for determining Young’s modulus of low-k films. The dependence of dispersion relation on the film thickness, elastic modulus of low-k materials as well as frequency are provided and discussed in detail. The study shows an obvious influence of layered structure on the dispersion relation of SAWs. For a fixed structure, the dispersion curvature increases with the decrease of Young’s modulus of low-k films.
Low-k, ULSI interconnection, Multi-layer, SAW, Young', s modulus
-
49浏览
-
0点赞
-
0收藏
-
0分享
-
157下载
-
0
-
引用