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【期刊论文】A STUDY ON THE NANOMETER GRID METHOD WITH THE SCANNING TUNNELING MICROSCOPE
谢惠民, by X.Huimin, D.Fulong, Y.Haiqiang, L.Ning, P.Dietz and A.Schmidt
Experimental Techniques; Jul/Aug 1998; 22, 4; ProQuest Science Journals pg. 23,-0001,():
-1年11月30日
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【期刊论文】A study on the digital nano-moir
谢惠民, Huimin Xie, Zhanwei Liu, Daining Fang, Fulong Dai, Hongjun Gao and Yapu Zhao
Meas. Sci. Technol. 15(2004)1716-1721,-0001,():
-1年11月30日
A novel digital nano-moir
digital grating,, nano-moir
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【期刊论文】In-plane deformation measurement using the atomic force microscope moir
谢惠民, Huimin Xie†, Satoshi Kishimoto‡, Anand Asundi†, Chai Gin Boay†, Norio Shinya‡, Jin Yu† and Bryan K A Ngoi†
Nanotechnology 11(2000)24-29. Printed in the UK,-0001,():
-1年11月30日
In this paper, a new scanning moir
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【期刊论文】Phase shifting nano-moir
谢惠民, Haixia Shang a, *, Huimin Xie a, Zhanwei Liu a, Haiming Guo b, Hongjun Gao b, Fulong Dai a
Optics and Lasers in Engineering 41(2004)755-765,-0001,():
-1年11月30日
In this paper, a new nano-moir
Nano-moir
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谢惠民, Huimin Xie a, *, Biao Li b, Robert Geer b, Bai Xu b, James Castracane b
Optics and Lasers in Engineering 40(2003)163-177,-0001,():
-1年11月30日
A focused ion beam (FIB) Moir!e method is proposed to measure the in-plane deformation of object in a micrometer scale. The FIB Moir!e is generated by the interference between a prepared specimen grating and FIB raster scan lines. The principle of the FIB Moir!e is described. The sensitivity and accuracy of deformation measurement are discussed in detail. Several specimen gratings with 0.14 and 0.20mm spacing are used to generate FIB Moire patterns. The FIB Moir!e method is successfully used to measure the residual deformation in a micro-electro-mechanical system structure after removing the SiO2 sacrificial layer with a 5000 lines/mm grating. The results demonstrate the feasibility of this method.
FIB Moir
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