成果题名:Composition, structure and optical properties of SiC buried layer formed by high dose carbon implantation into Si using metal vapor vacuum arc ion source
作者: Dihu Chen a,b,c,*, S.P. Wong b, Shenghong Yang a, D. Mo a
成果题名:Composition, structure and optical properties of SiC buried layer formed by high dose carbon implantation into Si using metal vapor vacuum arc ion source
作者: Dihu Chen a,b,c,*, S.P. Wong b, Shenghong Yang a, D. Mo a
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