成果题名:Microstructure of amorphous carbon nitride films fabricated by facing-target reactive magnetron sputtering
作者: Wang XC, Wu P, Li ZQ, Jiang EY, Bai HL
成果题名:Microstructure of amorphous carbon nitride films fabricated by facing-target reactive magnetron sputtering
作者: Wang XC, Wu P, Li ZQ, Jiang EY, Bai HL
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