Study on the design of anti-sticking structures in MEMS under different forces
SCIENCE IN CHINA (Series A), Vol. 44 supplement, June 2001，-0001，（）：
Mechanical stability and sticking are the troublesome problems in microfabrication and operation processes when separations of components in MEMS are in the sub-micrometer regime. Some mechanical effect, including quantum mechanical effect should be taken into account for solving the problems. The influence of capillary forces on sticking of a surface micromachined microcantilever in ambient environment or the rinse liquid and the influence of quantum mechanical effect such as the Casimir effect on sticking and stability of a micro membrane strip cavity structure in vacuum were investigated. A factual rough model theory about sticking problem under the Casimir effect was suggested for the first time. The study on the design of anti-sticking structures under different forces shows that sticking and stability of microcantilevers and micro membrane strip cavities has something to do with Young's modulus of materials, surface properties, length of structures, thickness of structures and separation between the fixed surface and the deflecting component. But, it is independent of width of structures. The map of the size design of anti-sticking structures was put forward for the first time. This also provides a way to design a MEMS structure with high resistance to collapse.
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