您当前所在位置: 首页 > 学者

薛晨阳

  • 46浏览

  • 0点赞

  • 0收藏

  • 0分享

  • 101下载

  • 0评论

  • 引用

期刊论文

Development of a novel GaAs micromachined accelerometer based on resonant tunneling diodes

薛晨阳Bo Li* Wendong Zhang Bin Xie Chenyang Xue Jijun Xiong

Sensors and Actuators A 143(2008)230-236,-0001,():

URL:

摘要/描述

This paper reports a novel GaAs micromachined accelerometer based on the meso-piezoresistive effects of resonant tunneling diodes (RTDs). The sensitive unit of the accelerometer is the RTD which is located at the root of the beams. Based on the meso-piezoresistive effects of RTD, the accelerometer transduces acceleration into electrical signal output. This kind of accelerometer has been fabricated by GaAs IC surface processes and control hole etching technology. The output sensitivity and frequency characteristics of the accelerometer have been tested on the vibrating system. The result indicates that when the RTD is biased in the negative differential resistance region, the sensitivity of the suggested accelerometer is up to 90.51mV/g, and when biased in the positive resistance region, the sensitivity is 2.39 mV/g. It is obvious that the sensitivity in the negative resistance region is more one order higher than that in the positive resistance region, and the sensitivity of the accelerometer can be adjusted through changing the bias voltage. A frequency range of this structure as high as 1.5 KHz has also been achieved.

【免责声明】以下全部内容由[薛晨阳]上传于[2010年06月01日 15时49分50秒],版权归原创者所有。本文仅代表作者本人观点,与本网站无关。本网站对文中陈述、观点判断保持中立,不对所包含内容的准确性、可靠性或完整性提供任何明示或暗示的保证。请读者仅作参考,并请自行承担全部责任。

我要评论

全部评论 0

本学者其他成果

    同领域成果