成果题名:Density functional theory study of initial stage of ZrO2 atomic layer deposition on Ge/Si (100)-(2
作者: Wei Chen, David Wei Zhang *, Jie Ren, Hong-Liang Lu, Jian-Yun Zhang, Min Xu, Ji-Tao Wang, Li-Kong Wang
成果题名:Density functional theory study of initial stage of ZrO2 atomic layer deposition on Ge/Si (100)-(2
作者: Wei Chen, David Wei Zhang *, Jie Ren, Hong-Liang Lu, Jian-Yun Zhang, Min Xu, Ji-Tao Wang, Li-Kong Wang
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